Cant install TWRP on my S10.

Hi
I want to install TWRP on my S10 (Exynos)
I enabled USB Debugging, OEM Unlocking and Bootloader Unlocked my Phone.
I flashed the latest TWRP over Odin on my S10.
After that I cant boot into the OS or TWRP.
It just opens the Download Mode.
Text in Download Mode:
ODIN MODE (AVB FAIL)
recovery: Error validating footer. (0)
recovery: Error verifying vbmeta Image: invalid vbmeta header (6)
VBMETA 6973FXXSGHUA4, 61143711R

Am I doing something wrong? Is my phone broken?

Thanks for anyone help

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