operational amplifier – Designing ASIC sensing circuitry for MEMS resonator capacitance output
I want to design sensing circuitry so that the change in capacitance is detectable by a 10-bit ADC. I am using Cadence Virtuoso to design the circuit and MEMS+ to design the resonator. In Virtuoso, my model looks like this:
The capacitance of the sensing comb is outputted and is in the range of 100 fF – 1 pF. I want it to detect the change in capacitance when ±1 g of acceleration is applied (V4 and V1).
A capacitor has two terminals that allow you to place it in series or parallel, however, I only have one pin so how can I use this to make sensing circuitry?
In summary, I want to use this output to achieve a voltage signal to the mV range using an opamp.
If anyone has any ideas of how to use this individual pin or what kind of opamp/filter I need, that would be extremely useful.
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