MEMS Inspection System – Advanced Spectral Technology, Inc.

The Automated MEMS Inspection System provides advanced imaging capabilities for microelectromechanical systems, delivering exceptional subsurface visualization and precise metrology. With both Near-Infrared (NIR) and Short-Wave Infrared (SWIR) imaging technologies, this system penetrates silicon and other wafer materials to inspect hidden structures, measure critical dimensions, and verify alignment in complex multi-layer MEMS devices.