Bibliographic Details
| Author |
Wang, Shudong
Wei, Xueyong
Zhao, Yulong
Jiang, Zhuangde
Shen, Yajing
|
| Issue Date |
2018
|
| Source |
Sensors and Actuators, A: Physical, v. 283, November 2018, p. 151-158 |
| Abstract |
According to their inherent characteristics, MEMS resonant accelerometers are suitable for low-frequency, low-g acceleration measurement. In this paper, we report a MEMS accelerometer based on double-ended-tuning fork resonators. The scale factor of our sensor is 1153.3 Hz/g and the bias stability of the oscillator is 58 ppb (parts per billion) for an averaging time of 1 s. The static test showed that the resolution of our sensor was 13.8 μg. The dynamic performance was demonstrated by single-frequency and hybrid-frequency vibration tests, and the results showed that our device is suitable for detecting low-frequency vibration (0.5–5 Hz). The cross-axis sensitivity is 1.33%. Compared with a standard charge accelerometer, our device showed its superiority in mixed acceleration measurement, which makes it a potentially attractive option for geophone or seismometer applications. © 2018 Elsevier B.V. |
| Publisher |
Elsevier B.V. |
| Subject |
|
| DOI |
10.1016/j.sna.2018.09.055 |
| ISSN |
0924-4247 |
| Language |
English |
| Type |
Article |
| Access |
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