A MEMS resonant accelerometer for low-frequency vibration detection – HKUST SPD

Bibliographic Details Author
Wang, Shudong

Wei, Xueyong

Zhao, Yulong

Jiang, Zhuangde

Shen, Yajing

Issue Date 2018 Source Sensors and Actuators, A: Physical, v. 283, November 2018, p. 151-158 Abstract According to their inherent characteristics, MEMS resonant accelerometers are suitable for low-frequency, low-g acceleration measurement. In this paper, we report a MEMS accelerometer based on double-ended-tuning fork resonators. The scale factor of our sensor is 1153.3 Hz/g and the bias stability of the oscillator is 58 ppb (parts per billion) for an averaging time of 1 s. The static test showed that the resolution of our sensor was 13.8 μg. The dynamic performance was demonstrated by single-frequency and hybrid-frequency vibration tests, and the results showed that our device is suitable for detecting low-frequency vibration (0.5–5 Hz). The cross-axis sensitivity is 1.33%. Compared with a standard charge accelerometer, our device showed its superiority in mixed acceleration measurement, which makes it a potentially attractive option for geophone or seismometer applications. © 2018 Elsevier B.V. Publisher Elsevier B.V. Subject DOI 10.1016/j.sna.2018.09.055 ISSN 0924-4247 Language English Type Article Access View full-text via Browzine
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